There's a Home CMOS group that some of you might be interested in.
irc.freenode.net #homecmos
First test of KOH etching of <110> Si with metal hardmask (die 5J3). 20μm half-pitch, 400x mag.
Nyanotechnology! This nyan cat is etched into a 200nm thick copper film and is around 600μm from head to tail.
Chip #5I4 (20 μm half-pitch lines in evaporated copper over Cr adhesion layer on silicon) seen at 170x magnification.
Chip #5I4 seen at 1000x magnification. Light areas are copper, dark are silicon, medium are incompletely etched chromium.
http://heybryan.org/
1 512 203 0507
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