Using benzophenone as a UV initiated polymerization inhibitor, some folks have shown direct patterning of PDMS via lithography.
Photodefinable PDMS thin films for microfabrication applications
Preetha Jothimuthu, Andrew Carroll, Ali Asgar S Bhagat, Gui Lin, James E Mark, Ian Papautsky
Photodefinable polydimethylsiloxane (PDMS) for rapid lab-on-a-chip prototyping
Ali Asgar S. Bhagat, Preetha Jothimuthu and Ian Papautsky
somewhat unrelated but has good chemistry diagrams
adding garnets to PDMS mix
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